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Microsensors

The purpose of the course is to provide a basic understanding of the most common microsensors and their front-end circuitry. Introduction to microsensor technology covering resistive, diode, Piezoelectric and capacitive sensors. Use of electrical and mechanical properties of Si in sensing applications. Important sensor properties such as linearity, sensitivity etc. are reviewed.

SemesterSummer
ECTS10
StructureLectures, Labs, Assignments
LanguageEnglish
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