Materials and device characterization

Characterization techniques relevant for semiconductor materials and devices. The techniques are described based on physical principles, and how the probing method (optical, electrical, electron-beam, X-ray, probing tips or other) interacts with the material or device under investigation. Emphasis is on interpretation of measurements (microscopy/ imaging, spectroscopy or diffraction) and the understanding of which material/ device parameters are probed with a given characterization technique. Electrical characterization to probe semiconductor devices are included