Microchip fabrication

The Microfabrication course explores the science of miniaturization; that is, the science of making sensors and actuators in micro and sub-micro scales. This science comprises an intimate understanding of the intended application, knowledge of the different manufacturing options, familiarity with all materials choices, and an understanding of scaling laws. By technology building down from the large to the small, the course surveyed include micromachining with single-crystal and polycrystalline Si and also other materials based on lithography as well as nonlithographphic technology. Specifically to say, the course will cover the lithography technology for transferring patterns, additive technology for deposition of structural materials, subtractive technology for etching structural material, integration of microfabrication processes for surface and bulk micromachining, top-down and bottom-up approach for miniaturization.